Ion implantation of semiconductors
Language: English Publication details: London Edward Arnold 1976Description: viii, 214 pDDC classification:- 621.38152 C245I
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621.38152 C 152 S Science and engineering of microelectronic fabrication | 621.38152 C 152 S Science and engineering of microelectronic fabrication | 621.38152 C 152 S Science and engineering of microelectronic fabrication | 621.38152 C245I Ion implantation of semiconductors | 621.38152 C466S Semiconductor device reliability | 621.38152 C47D Device physics of narrow gap semiconductors | 621.38152 C66I Introduction to the quantum theory of semiconductors |
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