Makabe, Toshiaki <br/><br/>
Plasma electronics: Applications in microelectronic device fabrication 

 - 2nd ed. 
 - Boca Raton  CRC Press  2020 
 - xxxv, 376 p. 
<br/><br/> 4029 11/02/2020 RBP20/78872 02/03/2020 Main Budget 
<br/><br/><label>ISBN: </label> RS 3495.00 
<br/><br/><label>Dewey Class. No.: </label>621.044 M278P(2)