TY  - BOOK
AU  - Makabe, Toshiaki
TI  - Plasma electronics: Applications in microelectronic device fabrication
U1  - 621.044 M278P(2) 
PY  - 2020///
CY  - Boca Raton
PB  - CRC Press
N1  - 4029 11/02/2020 RBP20/78872 02/03/2020 Main Budget
ER  -