Tiec, Yannick Lee, ed. <br/><br/>
Chemistry in microelectronics 

 - London  John Wiley  2013 
 - xii, 372 p. 
<br/><br/> 2763 16/08/2013 36306 29/08/2013 Main Budget 
<br/><br/><label>ISBN: </label> USD134.95 
<br/><br/><label>Dewey Class. No.: </label>621.381 T441C