TY  - BOOK
AU  - Seongbo Shim, Youngsoo Shin
TI  - Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
SN  - 978-3-319-76294-4
SN  - 2197-7127
PY  - 2018///
PB  - Springer International Publishing
UR  - https://doi.org/10.1007/978-3-319-76294-4
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-76294-4
ER  -