TY  - BOOK
AU  - Thorsten Lill
TI  - Atomic Layer Processing - Semiconductor Dry Etching Technology
SN  - 9783527824199
PY  - 2021///
PB  - Wiley-VCH
KW  - Physical Sciences & Engineering
UR  - https://onlinelibrary.wiley.com/doi/book/10.1002/9783527824199
ER  -