TY  - BOOK
AU  - Ladislav Bardos
TI  - Microwave Plasma Sources and Methods in Processing Technology
SN  - 9781119826903
PY  - 2022///
PB  - Wiley-IEEE Press
KW  - Physical Sciences & Engineering
UR  - https://onlinelibrary.wiley.com/doi/book/10.1002/9781119826903
ER  -