Baltes, H,ed. <br/><br/>
Enabling technology for MEMS and nanodevices: Advanced micro and nanosystems 

 - Weinheim  Wiley-VCH  2013 
 - xii, 427 p. 
<br/><br/> 3534 11/10/2013 36858 31/10/2013 Main Budget 
<br/><br/><label>ISBN: </label> USD95 
<br/><br/><label>Dewey Class. No.: </label>621.381 B217E