| 000 | 00397nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e110521 _aMAIN |
||
| 041 | _aEnglish | ||
| 082 | _a621.38152 W269T | ||
| 100 | _aWasa, kiyotaka | ||
| 245 | 0 | _aThir film materials technology: sputtering of compound materials | |
| 260 |
_aNew York _bWilliam Andrew _c2004 |
||
| 300 | _a518p p. | ||
| 942 | _cBK | ||
| 999 |
_c122803 _d122803 |
||