| 000 | 00361nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e110112 _aMAIN |
||
| 041 | _aEnglish | ||
| 082 | _a537.622 M452F | ||
| 100 | _aMay, Gary S. | ||
| 245 | 0 | _aFundamentals of semiconductor fabrication | |
| 260 |
_aSingapore _bWiley _c2004 |
||
| 300 | _a305 p. | ||
| 942 | _cBK | ||
| 999 |
_c135667 _d135667 |
||