| 000 | 00431nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e112674 _aMAIN |
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| 041 | _aEnglish | ||
| 082 | _a621.38152 C 152 S | ||
| 100 | _aCampbell, Stephen A | ||
| 245 | 0 | _aScience and engineering of microelectronic fabrication | |
| 250 | _a2nd ed. | ||
| 260 |
_aNew york _bOxford University Press _c2005 |
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| 300 | _axii, 603 p. | ||
| 942 | _cBK | ||
| 999 |
_c140794 _d140794 |
||