| 000 | 00383nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e210497 _aMAIN |
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| 041 | _aEnglish | ||
| 082 | _a620.5 L468F | ||
| 100 | _aLeach, Richard K | ||
| 245 | 0 | _aFundamental principles of engineering nanometrology | |
| 260 |
_aAmsterdam _bElsevier _c2010 |
||
| 300 | _axxvi, 321p p. | ||
| 942 | _cBK | ||
| 999 |
_c176663 _d176663 |
||