| 000 | 00386nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e67013 _aMAIN |
||
| 041 | _aEnglish | ||
| 082 | _a537.622 L885I | ||
| 100 | _aCrowder, Billy L, ed | ||
| 245 | 0 | _aIon implantation in semiconductors and other materials | |
| 260 |
_aNew York _bPlenum _c1973 |
||
| 300 | _axii, 657 p. | ||
| 942 | _cBK | ||
| 999 |
_c191388 _d191388 |
||