| 000 | 00370nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
| 040 |
_e117102 _aMAIN |
||
| 041 | _aEnglish | ||
| 082 | _a621.38152 W185I | ||
| 100 | _aWang, F F Y, ed. | ||
| 245 | 0 | _aImpurity doping processes in silicon | |
| 260 |
_aAmsterdam _bNorth-Holland _c1981 |
||
| 300 | _a643 p. | ||
| 942 | _cBK | ||
| 999 |
_c220801 _d220801 |
||