000 00385nam a2200157Ia 4500
008 230917s9999||||xx |||||||||||||| ||und||
020 _cPOU7.95
040 _e940
_aMAIN
041 _aEnglish
082 _a621.38152 C245I
100 _aCarter, G
245 0 _aIon implantation of semiconductors
260 _aLondon
_bEdward Arnold
_c1976
300 _aviii, 214 p.
942 _cBK
999 _c222087
_d222087