000 | 00385nam a2200157Ia 4500 | ||
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008 | 230917s9999||||xx |||||||||||||| ||und|| | ||
020 | _cPOU7.95 | ||
040 |
_e940 _aMAIN |
||
041 | _aEnglish | ||
082 | _a621.38152 C245I | ||
100 | _aCarter, G | ||
245 | 0 | _aIon implantation of semiconductors | |
260 |
_aLondon _bEdward Arnold _c1976 |
||
300 | _aviii, 214 p. | ||
942 | _cBK | ||
999 |
_c222087 _d222087 |