000 00377nam a2200157Ia 4500
008 230917s9999||||xx |||||||||||||| ||und||
020 _cFE370
040 _e18067
_aMAIN
041 _aEnglish
082 _a537.622 N633S
100 _aNishizawa, J, ed
245 0 _aSemiconductor technologies: 1982
260 _aTokyo
_bOhmsha
_c1981
300 _aiv,348 p.
942 _cBK
999 _c229765
_d229765