| 000 | 00464nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230921s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a978-3-030-33073-6 | ||
| 041 | _aEN | ||
| 100 | _aDeborah Munro | ||
| 245 | 0 | _aDIY MEMS | |
| 250 | _a1st ed. 2019 | ||
| 260 |
_c2019 _bSpringer International Publishing |
||
| 856 | _uhttps://doi.org/10.1007/978-3-030-33073-6 | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-33073-6 | ||
| 942 | _cEB | ||
| 999 |
_c263538 _d263538 |
||