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040 _e4920
_aMAIN
041 _aEnglish
082 _a621.38173 E67V
100 _aEinspruch, Norman G, ed
245 0 _aVSLI electronics: microstructure science
260 _aNew York
_bAcademic Press
_c1981
300 _axvi, 333 p.
942 _cBK
999 _c41672
_d41672