000 00352nam a2200145Ia 4500
008 230917s9999||||xx |||||||||||||| ||und||
040 _e134833
_aMAIN
041 _aEnglish
082 _a537.622 N633S
100 _aNishizawa, J, Ed
245 0 _aSemiconductor technologies
260 _aJapan
_bOhmsa, Ltd.,
_c1984
300 _a391p p.
942 _cBK
999 _c46249
_d46249