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040 _e64150
_aMAIN
041 _aEnglish
082 _a621.38152 V619I
100 _aVerweij, J F, ed.
245 0 _aInsulating films on semiconductors: Proceedings of the international conference INFOS83 Eindhoven, The Neitherlands, 11-13 April, 1983
260 _aAmsterdam
_bNorth-Holland
_c1983
300 _axiii, 284 p.
942 _cBK
999 _c47600
_d47600